pJs!&DL?.%7%9%F%`!"%^%k%A%a%G%#%"4XO"5!4o!"2HEEIJ!"EE;R%G%P%$%9!"EENO!&%(%M%k%.!<%7%9%F%`!"4D6-!&8x6&%7%9%F%`!";:6H5!4o$J$I$NI}9-$$@=IJ!&%5!<%S%9$rDs6!$7!"CO5e%l%Y%k$G$N;v6H$rE83+$7$F$$$^$9!#(B">
$B%X%C%@$r%9%-%C%W(B  Global Sites
    $B$*Ld$$9g$o$;(B    $B%K%e!<%9%j%j!<%9(B    $B%5%$%H%^%C%W(B Japan Site
$B$3$3$+$i%0%m!<%P%k!&%J%S%2!<%7%g%s(B |  $B%[!<%`(B  |  $B@=IJ!&%5!<%S%9(B  |  $BF|N)$K$D$$$F(B   |$B%0%m!<%P%k!&%J%S%2!<%7%g%s$3$3$^$G(B


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  $BF|N)@=:n=j5!3#8&5f=j!J=jD9!!;0LZ0l9n!K$O!"$3$N$?$S!"%P%$%*$H(BMEMS$B!J(BMicro Electro Mechanical Systems$B!K$rM;9g$7$?(B $B%P%$%*(BMEMS$B5;=Q$rMQ$$$F!"(B2$B
  $BF|N)$O!"$3$N(B4$B7n$+$i%9%?!<%H$7$?!V(Bi.e.HITACHI$B%W%i%s-6!W$K$*$$$F!"%P%$%*!&%a%G%#%+%k;v6H$rCmNO$9$Y$-;v6H$N0l$D$H0LCVIU$1!"(B2005$BG/EY$K(B2002$BG/EY$N(B1.8$BG\$NLs(B4,000$B2/1_$NGd>e9b$rL\;X$7$F$$$^$9!#;v6H3HBg$K8~$1$?=EE@;\:v$H$7$F!"8&5f3+H/;q8;$N=8CfEj2<$r7W2h$7$F$*$j!"6qBNE*$K$O!"!J(B1$B!KAa4|?GCG!&<#NE!"!J(B2$B!KM=KI!&7r9/A}?J!"!J(B3$B!K%F!<%i!<%a!<%I0eNE(B1)$B!&:F@80eNE$N(B3$B%F!<%^$r=EE@6/2=J,Ln$H0LCVIU$1$F$$$^$9!#Cf$G$b%F!<%i!<%a!<%I0eNE!&:F@80eNEJ,Ln$K$D$$$F$O!"(BDNA$B%7!<%1%s%5$d>.7?0dEA;R2r@OAuCV$H$H$b$K!">.7?2=!"Dc%3%9%H2=$rL\;X$7$?(BMEMS$B5;=Q$r%Y!<%9$H$9$k%P%$%*7WB,AuCV$KCmNO$7$F$$$^$9!#(B
  $BF|N)$K$O!"$3$l$^$G(BMEMS$B%;%s%5$d%^%$%/%mN.BN%G%P%$%9$K$*$1$k(B20$BG/$KOK$k8&5f$NC_@Q$,$"$j$^$9!#8=:_!"$3$l$i$N5;=Q;q8;$r=8Cf$9$k$3$H$K$h$C$F!"%P%$%*(BMEMS$B1~MQAuCV$rAa4|$K$N(B"$B%P%$%*(BMEMS$B3+H/!&@8;:5rE@(B"$B$r@_CV$7!"1?1D$7$F$$$^$9!#$3$N5rE@$G$O!"(B(1)MEMS$B2C9)5;=Q!&%^%$%/%mN.BN%G%P%$%9!"(B(2)$B2=3X!&%P%$%*8&5f!"(B(3)$BN.BN2r@O!&@8BN%7%_%e%l!<%7%g%s$NC4Ev
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$B0dEA;R8!::$O:#8e!"0eMQ$K$*$1$k3NDj?GCG$d!"3FZ$J$I!"$=$NMQES$O5^7c$K3HBg$9$k$H8+9~$^$l$F$$$^$9!#$=$N:]!"l$G$N;nLtA`:n$rHtLvE*$K4JJX2=$9$k%^%$%/%m8!::%A%C%W!JMh$G$OH>F|$rMW$7$?J#;($J8!::9)Dx$r(B1$B;~4VDxEY$G:Q$^$98+DL$7$,F@$i$l$^$7$?!#(B

  $B:#8e$O!"0eMQ?GCG!"AOLt!&@=Lt;Y1g!J%2%N%`!&%W%m%F%$%s7WB,!"%^%$%/%m%j%"%/%?!K!"%P%$%*1~MQ4D6-7WB,!":F@80eNEMQ:YK&G]M\$J$I$N%P%$%*!&%a%G%#%+%kJ,Ln$H$H$b$K!"B>J,Ln$K$bE83+$7$F$$$/M=Dj$G$9!#$^$?!"2=3X%W%m%;%95;=Q$d;nLt5;=Q$J$I$K4X$7$F$O!";:413XO"7H$d8\5R$H$N6&F18&5f!&6&F1;v6H$K
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$B#1!K%F!<%i!<%a!<%I0eNE!'(B $BNc$($P0eLtIJ$rEjM?$9$k>l9g!"8D?M$NBNl$G3NG'$7!"$=$l$K9g$o$;$?0eLtIJ$N=hJ}$r9T$&$3$H$,$G$-$k!#(B
 
 
 
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